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Orders AIXTRON Close Coupled Showerhead (CCS) reactor
March 28, 2013
By: DAVID SAVASTANO
Editor, Ink World Magazine
AIXTRON SE announced that China’s Peking University is adding to its AIXTRON equipment base with an order for a further Close Coupled Showerhead (CCS) reactor with capacity for three 2-inch (3×2”) substrates in a single run. The order was made in the second quarter of 2012, with delivery scheduled for the first quarter of 2013. One of the researchers who will be using the AIXTRON system is Professor Shen Bo. “We already have an AIXTRON CCS system in use, and we are very satisfied w...
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